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R&D

Total Solution Company Value Engineering

나노격자제어 코팅

Plasma Resistant Coating

What is Plasma Resistant Coating?
Corrosion of equipment parts occurs due to exposure to plasma, etching gas, and high-temperature process temperatures,
thereby generating a large amount of contaminated particles. This is a coating to prevent the resulting decline in production yield.
Technology Industry Background
In the case of Etching parts coatings in the current high-end market, foreign equipment manufacturers are monopolized (LAM)

Development Performance

Characteristics of Plasma Resistant Coating Film
Hardness (GPa)
Thickness deviation (%)
Grain Size (nm)
Characteristics of Plasma Resistant Coating Film
E-beam Sputter H100, H200
Principle A method of evaporating
the coating material and depositing
it on the substrate
Deposits the protruding target
particles by bombarding the ions
in the plasma with the target material.
Ion-assisted control + sputtering deposition
→ Nanolattice Control Coatings
Vapor Deposition Vapor(Liquid) Atomic Atomic + Ionic
Confomality Good Good Excellent
Adhesion to Substrate Bad Good Excellent
Precision Good Good Excellent
Hardness Bad Good Excellent
Thermal Stability Bad Good Excellent
Light Transmittance Good Good Excellent

Characteristics of Plasma Resistance

Plasma Exposure Test
Nano Lattice Structure