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제품소개

Total Solution Company Value Engineering

정밀세정/수리

  • Ion source parts for ion implanters.
  • Other semiconductor process equipment parts.
  • LED, display equipment parts.
  • R&D for medical equipment and other parts.

Cleaning Procedure

Systematic cleaning according to the product

Overhaul

Electrical resistance and insulation rate management

EPM of TRIDENT/TRIDENT XP
EPM of TRIDENT XP2
SETUP CUP
ROTARY MASS SLIT
ANGLE CUP
BUSHING