Plasma Applications

Material

  • Refractory metals
  • Tungsten / Rhenium
  • Molybdenum / TZM
  • Tantalum / Titanium
  • Lanthanum

  • Alloy Metals
  • Invar / Covar
  • Duralalloy / Hastelloy
  • Tough / Pitch
  • Copper / OFHC
  • Cu-alloy / Ni-Alloy

  • Nonmetals
  • Acetal / Peek
  • Teflon / Torlon
  • Polycabonate / Boron
  • Nitride

Corrosion of equipment parts occurs due to exposure to plasma, etching gas, and high-temperature process temperatures, Thereby generating a large amount of contaminated particles.
This is a coating to prevent the resulting decline in production yield.

RF ICP Source

Ceramic Tube

Shower Head

Aperture