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Refractory metals - Tungsten / Rhenium
- Molybdenum / TZM
- Tantalum / Titanium
- Lanthanum
Alloy Metals- Invar / Covar
- Duralalloy / Hastelloy
- Tough / Pitch
- Copper / OFHC
- Cu-alloy / Ni-Alloy
Nonmetals- Acetal / Peek
- Teflon / Torlon
- Polycabonate / Boron
- Nitride
Corrosion of equipment parts occurs due to exposure to plasma, etching gas, and high-temperature process temperatures,
Thereby generating a large amount of contaminated particles.
This is a coating to prevent the resulting decline in production yield.
RF ICP Source
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Ceramic Tube
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Shower Head
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Aperture
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